The Resonance Ltd. Transmission and Reflection Evaluation System is designed to deliver vacuum-ultraviolet (VUV) to ultraviolet (UV) radiation to a target sample and measure the reflectance, transmission or fluorescence of the target. The system includes a deuterium lamp emitting from 115 nm to 400 nm, a 327 mm focal length vacuum monochromator with a PC controlled motor drive, a Hamamatsu R8486 photomultiplier tube (PMT) capable of detecting from 115 to 320 nm, LabviewTM software and controlling electronics.