REX-(4,8) Excimer Lamp Light Sources
Our Xenon filled, RF powered lamp system is a reliable and maintenance free high intensity source of deep VUV emissions from 150 to
195nm. The system mounts to an easily customizable 350 x 400 mm flange for convenient connection to a HV or gas flow system. VUV
fluxes greater than 10 milliwatts/cm2 are delivered through the 230mm output aperture for use in applications such as wafer cleaning and
LCD panel cleaning.
Ozone delivery is a measure of the total VUV flux generated by the Excimer lamps. REX-4 delivers 1 gram of ozone in 400 seconds when
pure dry oxygen is flowed through the reflector housing. In normal operation the reflector is purged with dry nitrogen or argon to allow
maximum transmission of VUV to the working surface.
Flux Transmission at 172nm
Through Aperture with Quartz Window
Copyright Resonance Ltd., December 2011
143 Ferndale Drive North, Barrie, ON L4N 9V9 Tel: 705-733-3633 Fax: 705-733-1388 Email:sales@resonance.on.ca
Flux Transmission at 172nm
Through Aperture without Quartz Window
Xenon
414cm2
4 or 8
23mm
23cm
164 - 177nm
172nm
12mW/cm2
38.2 x 29.0 x 25.0cm
15kg
Gas Fill
Output Area
Number of Lamp Tubes
Plasma Diameter
Plasma Length
Half-power points
Peak Wavelength
Average VUV intensity
Dimensions
Mass
