High Resolution VUV/UV Transmission and Reflection Evaluation systemTransmission and Reflection Evaluation systemXenon Excimer 20cm wafer cleaning systemAtomic Oxygen exposure chamber systemHigh speed oil-free pumping systemCompact oil-free pumping systemHigh power RF Atomic Oxygen generatorBasic RF Atomic Oxygen generatorVUV-UV solar simulatorIrradiance profilerAtomic Oxygen absorption systemAtomic Oxygen density profilerAtomic Oxygen treatment systemAtomic Oxygen treatment systemAtomic Oxygen treatment system
Systems
Oxygen atom measuring systemEnhanced Oxygen atom measuring systemEnhanced Hydrogen atom measuring systemEnhanced Chlorine atom measuring systemMercury atom measuring systemOH molecular measuring systemNO measuring systemOzone measuring system
Absorption Based Gas Detection Systems
Oxygen atom fluorescence systemHydrogen atom fluorescence systemNitrogen atom fluorescence systemChlorine atom fluorescence systemMercury fluorescence systemOH molecular fluorescence systemNO fluorescence systemCO fluorescence system