EXCIMER LAMPS

light source-VUV UV-High Power Excimer-01-Resonance

Excimer

Our Xenon filled, RF powered lamp system is a reliable and maintenance free high intensity source of deep VUV emissions from 150 to 195nm.  The system mounts to an easily customizable 350 x 400 mm flange for convenient connection to a HV or gas flow system.  VUV fluxes greater than 10 milliwatts/cm2 are delivered through the 230mm output aperture for use in applications such as wafer cleaning and LCD panel cleaning.

  • Specifications
  • Accessories/Options
  • Spectra
  • What is an Excimer Lamp?

Electrical/Optical


Minimum

Average

Maximum

Unit

Gas Fill


Xenon



Window Material


SS Qtz



Lamp Tubes


4

8


Clear Aperture of window


23 cir.

23 sq,

cm

Plasma diameter inside

22

23

24

mm

Plasma length inside

22

23

24

cm

Spectral output


164-177


nm

Peak Wavelength


172


nm

Average VUV intensity


12

mW/cm2

Light Sources, Spectrometers, Monochromators, Detectors , Components and Systems from Extreme Ultraviolet (EUV) to Infrared (IR)

Resonance Ltd  | Telephone (705)733-3633

143 Ferndale Drive North, Barrie, Ontario L4N 9V9 Canada