EXCIMER LAMPS
Excimer
Our Xenon filled, RF powered lamp system is a reliable and maintenance free high intensity source of deep VUV emissions from 150 to 195nm. The system mounts to an easily customizable 350 x 400 mm flange for convenient connection to a HV or gas flow system. VUV fluxes greater than 10 milliwatts/cm2 are delivered through the 230mm output aperture for use in applications such as wafer cleaning and LCD panel cleaning.
- Specifications
- Accessories/Options
- Spectra
- What is an Excimer Lamp?
Electrical/Optical | ||||
---|---|---|---|---|
Minimum | Average | Maximum | Unit | |
Gas Fill | Xenon | |||
Window Material | SS Qtz | |||
Lamp Tubes | 4 | 8 | ||
Clear Aperture of window | 23 cir. | 23 sq, | cm | |
Plasma diameter inside | 22 | 23 | 24 | mm |
Plasma length inside | 22 | 23 | 24 | cm |
Spectral output | 164-177 | nm | ||
Peak Wavelength | 172 | nm | ||
Average VUV intensity | 12 | mW/cm2 |
Light Sources, Spectrometers, Monochromators, Detectors , Components and Systems from Extreme Ultraviolet (EUV) to Infrared (IR)
Resonance Ltd | Telephone (705)733-3633
143 Ferndale Drive North, Barrie, Ontario L4N 9V9 Canada