Copyright Resonance Ltd., December 2011
143 Ferndale Drive North, Barrie, ON L4N 9V9 Tel: 705-733-3633 Fax: 705-733-1388 Email:sales@resonance.on.ca
24W RF-Powered Light Sources
Manual Page 3
RF-Powered RUV/VUV Flow Lamp
Specifications
Operating Procedures (normal operation)
The flow lamp can be operated with any non-corrosive gas to obtain EUV spectra. Typically, the supply line is pressurized
to a few PSI above ambient pressure (10 to 100 kPa). To operate:
1. Connect gas supply line
Connect the input (the green valve) to green valve that is connected to the metering valve. Make sure the
second Green valve is closed.
2. Pump out the gas supply line
Open the input valves (green and the black metering valve) to pump out the supply line up to the pressure gauge
head. The pressure should fall to better than 10^-1Torr in the mono/spectrometer at this stage.
3. Purge the supply line with gas
The main cylinder valve to the gas supply should be opened and the two valves (green and black metering
valves) closed.
4. Adjust the flow of gas
In normal operation (with Ar, Xe, Kr, Ne, He, or N2) the green valve connected to the metering valve should be
opened and the metering valve set so that the flow of gas is quite small (10 to 35 small div). This will maintain
pressure at a few Torr in the flow lamp and less than 10^-1Torr in the mono/spectrometer.
5. Switch on the RF in the flow lamp and start the lamp
After the gas is flowing the RF should be switched on by plugging in the wall unit. If a power supply is used the
voltage should be set to 24 volts and the current should be in the 0.2 to 0.75-amp range.
The plasma will be self-starting. If the lamp will not start, verify that the power supply is properly connected and
functional and that there is a sufficient vacuum (the lamp will not start when this pressure is > ~1 Torr). If the
lamp still will not start, a Tesla coil (set on low) can be touched to the glass tube inside the lamp housing.
6. Optimize the intensity
Once the plasma is ignited, adjust the gas flow using the metering valve to quickly optimize the intensity.
Calibration in Normal Operating Mode
VUV Flow Lamp with Br2 Flow
24-Watt RF Fiber-Optic-Output Light Sources
KrLP-LFO & NeLP-LFO
Operating Procedure
1. Connect fiber optic cable to both lamp and receiving instrument
2. Plug DC power supply into 110V supply
3. Connect the 9 pin connector to the lamp. The lamp will start immediately along with the built in cooling fan
4. To maximize the bulb life, unplug the unit when not in use
5. In the event that the fan stops working do not run the unit as the main transistor can overheat and fail
Test Spectrum
24-Watt RF Light Source with 5cm Parabolic Mirror
Kinematic Mount Instructions for Parabolic Mirror Adjustment
The parabolic mirror can be adjusted to precisely aim the reflected VUV light. The mirror uses a kinematic-style mount with
3 adjustment screws and one central locking screw. There is a cap that must be removed to access the adjustment screws:
In order to adjust the mirror, loosen the central locking screw by turning it counter-clockwise no more than 1 turn and then
loosening/tightening each of the three adjustment screws to change the mirror’s angle. Do not loosen the adjustment
screws more than 1 turn at a time.
Description
The Resonance EUV windowless source is an
RF-excited flow lamp with a capillary bore in an
EMI-shielded enclosure. This lamp mounts to a
2.75 inch or larger CF type flange. The lamp
assembly has an integral RF exciter that is
powered by a small wall plug power supply. This
supply is sufficient to produce, emissions from the
principal neutral rare gas species in the range of
1015 photons per second per steradian. This light
source employs a “reverse flow” feature that
directs the gas away from the vacuum chamber.
This feature reduces gas use and produces a
higher intensity.
Model
EUV-XL-L
