light source-VUV UV-High Power Excimer-01-Resonance


Our Xenon filled, RF powered lamp system is a reliable and maintenance free high intensity source of deep VUV emissions from 150 to 195nm.  The system mounts to an easily customizable 350 x 400 mm flange for convenient connection to a HV or gas flow system.  VUV fluxes greater than 10 milliwatts/cm2 are delivered through the 230mm output aperture for use in applications such as wafer cleaning and LCD panel cleaning.

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Light Sources, Spectrometers, Monochromators, Detectors , Components and Systems from Extreme Ultraviolet (EUV) to Infrared (IR)

Resonance Ltd  | Telephone (705)733-3633

143 Ferndale Drive North, Barrie, Ontario L4N 9V9 Canada