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The
Resonance
EUV
windowless
source
is
an
RF excited flow lamp with a
capillary bore in an EMI shielded enclosure. This lamp mounts to a
33.78 mm or larger CF type flange.
The
lamp
assembly
has
an
integral
RF
exciter which is powered by a small
wall plug power supply. This supply is sufficient to produce emissions
from the principal neutral rare gas species in the range of 10^15
photons per second per steradian.
Differential
pumping
can
take
place
through
a
VUV monochromator or spectrometer. For
broad band emission, the monochromator is set on zero order. In this
mode all the spectral emissions from the lamp pass through the exit
slit of the monochromator. Additionally the monochromator can be set at
any wavelength in the 25 to 10,000 nm region. In this mode the
monochromator acts as a spectral filter giving monochromatic output.
How
is
a
Flow
Lamp
Different
from
an Ordinary Light Source?
A
flow
lamp
does
not
have
a
window and thus can produce lines at
wavelengths shorter than the cutoff of Lithium Fluoride (wavelengths
<104nm). A glass tube passes through a
coil which is excited by an RF generator running at ~100 MHz. The glass tube and RF generator are contained
in a metal box with RF isolating feed-through capacitors.
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