Oxygen
Absorption
Measuring
System
(OAMS)
Measures
atomic
oxygen
density
in chamber by resonance absorption
Basic
system
for
low
density applications (10^10-10^13 atoms/cm^3)
System
is
"plug
and
run" including everything required to make measurements
System includes:
- Atomic Oxygen Resonance
Lamp (OHeLM-L) including integral shielded
RF power supply and vacuum coupling
- CsI VUV Photodiode (CsIM-D) including integral shielded preamp and
vacuum coupling
- Conflat Mounting flanges and
adapters to lamp and detector assemblies
- Control electronics
module which includes:
- Power supplies for lamp
and detector
- Microcomputer controlled
phase sensitive detector
- Serial interface to
notebook or desktop PC
- Software for acquiring
and displaying real time atomic density data on a PC
Nitrogen
Atom
Measuring
System
(NAMS)
Measures
atomic
nitrogen
density
in chamber by resonance absorption
Basic
system
for
low
density applications (10^10-10^13 atoms/cm^3)
System
is
"plug
and
run" including everything required to make measurements
System includes:
- Atomic Nitrogen
Resonance Lamp (NHeLM-L) including integral
shielded RF power supply and vacuum coupling
- CsI VUV Photodiode (CsIM-D) including integral shielded preamp and
vacuum coupling
- Conflat Mounting flanges and
adapters to lamp and detector assemblies
- Control electronics
module which includes:
- Power supplies for lamp
and detector
- Microcomputer controlled
phase sensitive detector
- Serial interface to
notebook or desktop PC
- Software for acquiring
and displaying real time atomic density data on a PC
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